Front-End STOCKERSystem for 200 mm wafer
Customized front-end storage module for 200 mm wafer vertical furnace processing equipment
- Up to 21 storage shelves.
- Connect with vertical furnace equipment to achieve fully automation process.
- Utilizing advanced robotics and control software to achieve fully automated cassette storage, retrieval, and tracking operations.
- Equipment structure and communication protocol comply with SEMI standards.
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Load/Unload Interface:
1. SMIF Opener
2. OHT with SF Opener
3. Open Cassette I/O port
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