Front-End Stocker System

• Customized front-end module for fully automatic 300mm wafer equipment up to 16 individual storage locations.
• FOUP storage system with advanced robotics integrated in the technology to ensure faster and more reliable FOUP pick/placement.
• N2/XCDA Purge system as an optional application for FOUP storage location.
• Supporting SECS/GEN protocol and friendly GUI operation.
• Built-in monitor video system.