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Mini Foup Stocker System
供應情形： 有現貨
型號： Mini
Mini Foup Stocker System
Customized fully automatic 300mm wafer FOUP storage equipment up to 26 individual storage locations.
Advanced robotics featuring highly optimized motion and control software technology to achieve full automation of FOUP storage, retrieval and tracking operations.
In line with camera and manual operations for external teaching functions.
N2/XCDA Purge circulation mode.