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    FPD Robot

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    IC Robot

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    Automation Equipment

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    Robot Repair

  • Work Flow & Inspection
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  • Repaired cases photos
  • Repaired cases Inquiry
  • Repaired Case :AI TEC
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  • Repaired Case :BROOKS
  • Repaired Case :CANON
  • Repaired Case :DAIHEN
  • Repaired Case :GENMARK
  • Repaired Case :HIRATA
  • Repaired Case :HITACHI
  • Repaired Case :IDE
  • Repaired Case :JEL
  • Repaired Case :KAWASAKI
  • Repaired Case :MECS
  • Repaired Case :NIKON
  • Repaired Case :RORZE
  • Repaired Case :SANKYO
  • Repaired Case :SHINKO
  • Repaired Case :TAZMO
  • Repaired Case :ULSTA
  • Repaired Case :YASKAWA

    Components Parts

  • LCD\Wafer UV Lamp
  • Solar RV Reduction Gear
  • Glass Heater
  • Suceptr Heater
  • Photo Ionizer
  • Heater for Vacuum Equipment
  • Contact angle meter
  • Reticle Barcode Reader
 

Repaired Case :BROOKS

■ Maintenance Availably Robot List
 
Robot Type EQ Maker
ATM ATR8 AUGUST
 
 
三和技研股份有限公司 Sanwa Engineering Corp.　地址：新竹縣芎林鄉五和街228號 (五華工業區)　電話：03-593-6798　傳真：03-593-5158
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